Vacuum pumps
Helium 3 offers a complete portfolio of vacuum equipment ranging from rough vacuum to high vacuum solutions, including oil-lubricated and dry pump technologies designed for demanding industrial and scientific environments. Our systems ensure reliable performance, low maintenance, and compatibility with corrosive gases, particulate-rich processes, and cleanroom conditions. Whether you require primary vacuum generation or high-throughput solutions for R&D, analytical instrumentation, or process chambers, our engineering team will help you select the optimal pump for your application.
NeoDry series
7 m3/h to 1200 m3/h
Ultimate pressure 5x10-3 mbar
Ultimate pressure 5x10-3 mbar
EVD Series
5,4 m3/h to 90 m3/h
Ultimate pressure 10E-4 mbar
Ultimate pressure 10E-4 mbar
EVT Series
25 l/s to 3.600 l/s
Ultimate pressure <10-9 mbar
Ultimate pressure <10-9 mbar
IPH Series
120 m3/h to 1850 m3/h
7.5 x 10-3 Torr and 7.5 x 10-4
7.5 x 10-3 Torr and 7.5 x 10-4
EV Series
8 m3/h hasta 1000 m3/h
0,5 mbar hasta 2 mbar
0,5 mbar hasta 2 mbar
EVC Series
65 m3/h hasta 950 m3/h
10 mbar hasta 65 mbar
10 mbar hasta 65 mbar
EVD-VE Series
1,7 m3/h hasta 17 m3/h
0,05 mbar hasta 3x10E-3 mbar
0,05 mbar hasta 3x10E-3 mbar
EVDR Series
8 m3/h hasta 137 m3/h
-0,6 bar/ +0,6 bar hasta 2 mbar
-0,6 bar/ +0,6 bar hasta 2 mbar
EVCP Series
56 m3/h hasta 500 m3/h
0,5 bar hasta 2 bar
0,5 bar hasta 2 bar
EVM Series
1,2 m3/h hasta 1000 m3/h
25 mbar hasta 200 mbar
25 mbar hasta 200 mbar
EVPP Series
40 ltr/min hasta 140 ltr/min
-0,88 hasta -0,98 bar
-0,88 hasta -0,98 bar
EVR Series
108 m3/h hasta 9000 m3/h
3x10E-4 mbar
3x10E-4 mbar
EVSC Series
280 m3/h hasta 1.100 m3/h
-440 mbar hasta 570 mbar
-440 mbar hasta 570 mbar
EV Series
8 m3/h hasta 1000 m3/h
0,5 mbar hasta 2 mbar
0,5 mbar hasta 2 mbar