NANOFABRICATOR® PRO
Empowering material innovation and prototyping with multi-material sequential deposition and unmatched sample versatility levating industrial capabilities. Discover the power of advanced micro- and nano-scale fabrication.
Pushing the Boundaries of Micro & Nano Fabrication
- Deposition speed up to 500 mm/s
- Up to 6 Materials simultaneously
- 400 to 50 µm Line Width
- Sample size up to 200 mm
Sequential deposition of up to 6 materials 6 different precursors and 6 different reactants can be loaded at the same time, allowing you to quickly switch between the materials you wish to deposit or test.
The stage of NANOFABRICATOR® PRO can accommodate wafers up to 8” and other shapes under 200×200 mm.
The NANOFABRICATOR® PRO stage can move up to 500mm/s, with a deposition speed dependent on the sample and process specifications.
Advanced Microfabrication
Rapid, Flexible, Versatile
& Atimically Precise Processing
At the heart of the NANOFABRICATOR® PRO is the Direct Atomic Layer Processing (DALP®) technology, a breakthrough in nanoscale engineering. This technology allows for atomic-scale precision, enabling the creation of materials and devices with unprecedented accuracy and complexity.
It is designed for rapid prototyping and the development of new device structures, offering a wide selection of materials
for Atomic Layer Deposition (ALD) processes. Additionally, its lithography-less single-wafer optimization significantly streamlines the fabrication process, making it an ideal tool for innovative and efficient prototype development in various scientific
and industrial fields.
DALP® has revolutionized prototyping, turning a traditionally lengthy process into a rapid, precise operation. Key benefits include accelerated development cycles, atomic-level control for complex prototypes, versatile material and surface adaptability, and cost reductions due to increased efficiency. This advancement in DALP® fosters a conducive environment for innovative microdevice fabrication, marking a significant leap in microfabrication technology.
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