Scanning Probe Microscopy
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ezAFM
Dynamic Mode (Tapping Mode)
Lateral Force Microscopy (LFM)
Magnetic Force Microscopy (MFM)
f-d Spectroscopy
Optional AQUA(Liquid mode) Scan Head
ezAFM+
Contact Mode
Dynamic Mode (Tapping Mode)
Lateral Force Microscopy (LFM)
Magnetic Force Microscopy (MFM)
f-d Spectroscopy
Piezo Response Force Microscopy
Kelvin Probe Force Microscopy
Conductive AFM
Scanning Spreading Resistance Microscopy
Lithography
Liquid Modes
Optional AQUA(Liquid mode) Scan Head
ezSTM
Current Step
Size 0.1 pA 0.1 Pa
Scan Range
0.5×0.5×0.2 µm 1x1x0.5 µm
XY Resolution
1 pm 1 pm
Z Resolution
0.5 pm 0.5 pm
Imaging Modes
Constant current
Constant height
Spectroscopy
Current-Voltage Current-Distance
Sample Approach
Ultrasonic motors
Camera
Focus
Zoom Manual Focus
5X Digital Zooming Manual Focus
5X Digital Zooming
User License
Unlimited
hpAFM
Closed loop flexure scanner
Decoupled z scanner
Optical Microscope
Operating Modes
Contact Mode AFM
Lateral Force Microscope (LFM)
Dynamic Mode AFM & Phase Imaging
Non-contact Mode AFM with digital PLL
Liquid AFM
Magnetic Force Microscope (MFM)
Electrostatic Force Microscope (EFM)
Scanning Tunnelling Microscopy (STM)
Piezo Response Force Microscopy (PRFM)
Conductive AFM (CAFM) / Scanning Spreading Resistance Microscopy (SSRM)
AFM Lithography (Scratching)
Force Modulation Mode
Kelvin Probe Force Microscopy (KPFM)
Nano Mechanical Imaging (NMI)
Electro Chemical AFM (EC-AFM)
Nanoindentation
Advanced PFM