EDA 407

Specially designed to comply with the increasing requirements of the electronic device industry for product monitoring and quality control of small hermetically sealed electronic components. The high-performance quadrupole mass spectrometer for humidity analysis in electronic devices is available with customized sample holders and breaking chambers and is individually adjustable for devices with various dimensions.

PRODUCT HIGHLIGHTS

Humidity analysis for small hermetically sealed electronic components

High-performance quadrupole mass spectrometer for quality control of electronic devices

Detection limit for water <500 ppm for volumes 10 - 500 µl

Qualitative and quantitative analysis of gas inclusions inside the housing of electronic devices from ppm to 100%

Fully automated data analysis

DETAILS

High sensitive ion source

90° off axis SEM detector

Customized sample holders and breaking devices Individually adjustable for devices with various dimensions

Humidity generator for calibration with water vapour Dew point temperature from -30°C to +15°C (500 - 17.000 ppm H2O)

TECHNICAL DATA

Mass range
1 - 512 amu

PC
Windows® 7 or higher

Software
InProcess Quadstar

Data communication
Ethernet, PROFIBUS, PROFINET, OPC others on request

Electrical connection
Main voltage 115/230 V, 50/60 Hz others on request

Protection class
IP 54

Ambient conditions
Temperature < 35°C; rel. humidity < 75%

Dimensions
Standard: ca. 700 x 920 x 1270 mm + ca. 600 x 810 x 1700 mm (w x d x h)

Weight
Standard: ca. 600 kg

FIELDS OF APPLICATION

Electronic Device Industry

Research Facilities

Miscellaneous Industries

Online Process Analysis

Quality Control

Special Applications

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