-Less than 1 micron vibration
-Temperature range (with 4 probe arms installed) from 4.5 K to 350 K (optional: 6.5 K to 475 K or 6.5 K to 675 K)
-Accommodates up to 2” (51 mm) diameter wafers (optional: up to 8” [200 mm]) (see specifications chart for more details)
-Up to eight cooled, easily interchangeable, micro-manipulated probe arms
-Electrical measurements from DC to 67 GHz
-Wide variety of inexpensive LF probe tips that are easy to replace
-Very low triaxial probe arms leakage current (typically 1 to 2 fA @ 1V)
-Non-contact, non-destructive Kelvin probes
-Multi-tip probes
-Fiber probe arms with single and multi mode fiber options
-Additional electrical feedthroughs with cables and wires to sample area
-Optional special miniature vacuum chamber to transfer sample under vacuum from Glove Box to Probe Station
-Precise translation X-Y-Z- travel stages for all monoscope system assemblies
-Optional movable chuck
-System customization options