Benefits
  • Wide measurement range from 1 x 10-9 to 1 x 10-2 mbar (7.5 x 10-10 to 7.5 x 10-3 Torr)
  • All-metal cold cathode sensor (Penning) with ceramic feedthrough
  • Innovative electrode geometry provides excellent ignition properties
  • Decreased high voltage after plasma ignition and titanium cathode plates reduce risk of contamination, even during sputtering operations with argon
  • The anode ring and the titanium cathode can be cleaned or replaced easily
  • Minimal magnetic field intensity adjacent to gauge
  • LED indicator for power on and plasma ignited
  • Logarithmic analog output signal
  • Fieldbus interface (Profibus DB, DeviceNet) for easy integration into vacuum systems using network communications

    Typical Applications
  • High vacuum pressure monitoring
  • Evaporation and sputtering systems
  • General vacuum measurement and control in the fine and high vacuum range
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