Benefits
Wide measurement range from 1 x 10-9 to 1 x 10-2 mbar (7.5 x 10-10 to 7.5 x 10-3 Torr)
All-metal cold cathode sensor (Penning) with ceramic feedthrough
Innovative electrode geometry provides excellent ignition properties
Decreased high voltage after plasma ignition and titanium cathode plates reduce risk of contamination, even during sputtering operations with argon
The anode ring and the titanium cathode can be cleaned or replaced easily
Minimal magnetic field intensity adjacent to gauge
LED indicator for power on and plasma ignited
Logarithmic analog output signal
Fieldbus interface (Profibus DB, DeviceNet) for easy integration into vacuum systems using network communications
Typical Applications
High vacuum pressure monitoring
Evaporation and sputtering systems
General vacuum measurement and control in the fine and high vacuum range
Typical Applications
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