Benefits
Combination gauge – Inverted Magnetron & Pirani
Wide measurement range from 5 x 10-9 mbar to atmosphere
No filament to burn out
Excellent ignition properties
Easy to clean
FPM or metal-sealed feedthrough
LED indicator for high voltage on
Logarithmic analog output signal
Typical Applications
High vacuum pressure monitoring
Base pressure for evaporation and sputtering systems
General vacuum measurement and control in the medium and high vacuum range
Typical Applications
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