Benefits
HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
User selectable hot ion emission activation between 5×10-2 and 1 mbar
Pirani interlock protects the hot filament from premature burnout
Optional graphic display and Fieldbus interfaces available
Automatic high vacuum Pirani adjustment reduces operator interventions
Typical Applications
Sputter applications in semiconductor manufacturing, electronics and media industry
Industrial coating
General vacuum measurement and control in the low to high vacuum range