Benefits
Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
Overpressure detection protects the filament from premature burnout
Two long-life yttrium oxide coated iridium filaments
Automatic emission current selection reduces control complexity
Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
RoHS compliance
Typical Applications
Pressure measurement in semiconductor process and transfer chambers
Industrial coating
General vacuum measurement and control in the low to ultra high vacuum range
Typical Applications
Si desea información sobre cualquier producto, solicitar una oferta o realizar un pedido puede hacerlo a través del siguiente formulario. También llamando al 910 097 846. Estaremos encantados de atenderle.