Benefits
Full scale ranges from 100 mTorr … 1000 Torr
Fast stability after power on
Fast recovery from atmospheric pressure
Corrosion resistant ceramic sensor
Excellent long term signal stability
Temperature compensated
Sensor protected from contamination
One pushbutton zero function
Wide range power supply
Typical Applications
Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
Data storage and display manufacturing equipment
Industrial vacuum equipment
General high accuracy pressure measurement
Typical Applications
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