Helium 3 offers a complete range of equipment from rough vacuum till high vacuum and dry pumps.
NeoDry and MU-X series
Dry Vacuum Pumps
7 m3/h a 1200 m3/h
vacío final hasta 5x10-3 mbar
EVT Series
Turbo Molecular Vacuum Pumps
25 l/s hasta 3.600 l/s
presión final <10-9 mbar
presión final <10-9 mbar
TM Series
Cryopumps
5040 m3/h hasta 2700000 m3/h
5040 m3/h hasta 2700000 m3/h
EV Series
Oil Recirculation, Single Stage, Air-Cooled and Direct Driven
8 m3/h hasta 1000 m3/h
0,5 mbar hasta 2 mbar
8 m3/h hasta 1000 m3/h
0,5 mbar hasta 2 mbar
EVC Series
Dry Running Claw Vacuum Pumps
65 m3/h hasta 950 m3/h
10 mbar hasta 65 mbar
65 m3/h hasta 950 m3/h
10 mbar hasta 65 mbar
EVD Series
Oil Recirculation, Double Stage, Air-Cooled and Direct Driven
5,4 m3/h hasta 90 m3/h
10E-4 mbar
5,4 m3/h hasta 90 m3/h
10E-4 mbar
EVD-VE Series
Oil Recirculation, Single or Double Stage, Air-Cooled and Direct Driven
1,7 m3/h hasta 17 m3/h
0,05 mbar hasta 3x10E-3 mbar
1,7 m3/h hasta 17 m3/h
0,05 mbar hasta 3x10E-3 mbar
EVDR Series
100% oil less operation, Single Stage, Air-Cooled and Direct Driven
8 m3/h hasta 137 m3/h
-0,6 bar/ +0,6 bar hasta 2 mbar
8 m3/h hasta 137 m3/h
-0,6 bar/ +0,6 bar hasta 2 mbar
EVCP Series
Dry Running Claw Compressor
56 m3/h hasta 500 m3/h
0,5 bar hasta 2 bar
56 m3/h hasta 500 m3/h
0,5 bar hasta 2 bar
EVM Series
Quiet running oil free vacuum pumps
1,2 m3/h hasta 1000 m3/h
25 mbar hasta 200 mbar
1,2 m3/h hasta 1000 m3/h
25 mbar hasta 200 mbar
EVPP Series
Dry running, air-cooled and direct driven
40 ltr/min hasta 140 ltr/min
-0,88 hasta -0,98 bar
40 ltr/min hasta 140 ltr/min
-0,88 hasta -0,98 bar
EVR Series
Robust vacuum Roots booster pumps
108 m3/h hasta 9000 m3/h
3x10E-4 mbar
108 m3/h hasta 9000 m3/h
3x10E-4 mbar
EVSC Series
Dry running and non-contact blowers
280 m3/h hasta 1.100 m3/h
-440 mbar hasta 570 mbar
280 m3/h hasta 1.100 m3/h
-440 mbar hasta 570 mbar