Helium 3 offers a complete range of equipment from rough vacuum till high vacuum and dry pumps.

NeoDry and MU-X series

Dry Vacuum Pumps 7 m3/h a 1200 m3/h vacío final hasta 5x10-3 mbar
evt

EVT Series

Turbo Molecular Vacuum Pumps 25 l/s hasta 3.600 l/s
presión final <10-9 mbar

TM Series

Cryopumps
5040 m3/h hasta 2700000 m3/h

EV Series

Oil Recirculation, Single Stage, Air-Cooled and Direct Driven
8 m3/h hasta 1000 m3/h
0,5 mbar hasta 2 mbar
Prueba 3

EVC Series

Dry Running Claw Vacuum Pumps
65 m3/h hasta 950 m3/h
10 mbar hasta 65 mbar
EVD 36

EVD Series

Oil Recirculation, Double Stage, Air-Cooled and Direct Driven
5,4 m3/h hasta 90 m3/h
10E-4 mbar
evd ve2

EVD-VE Series

Oil Recirculation, Single or Double Stage, Air-Cooled and Direct Driven
1,7 m3/h hasta 17 m3/h
0,05 mbar hasta 3x10E-3 mbar
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EVDR Series

100% oil less operation, Single Stage, Air-Cooled and Direct Driven
8 m3/h hasta 137 m3/h
-0,6 bar/ +0,6 bar hasta 2 mbar
evcp 0255

EVCP Series

Dry Running Claw Compressor
56 m3/h hasta 500 m3/h
0,5 bar hasta 2 bar
evm d

EVM Series

Quiet running oil free vacuum pumps
1,2 m3/h hasta 1000 m3/h
25 mbar hasta 200 mbar
evpp

EVPP Series

Dry running, air-cooled and direct driven
40 ltr/min hasta 140 ltr/min
-0,88 hasta -0,98 bar
evr

EVR Series

Robust vacuum Roots booster pumps
108 m3/h hasta 9000 m3/h
3x10E-4 mbar
evsc

EVSC Series

Dry running and non-contact blowers
280 m3/h hasta 1.100 m3/h
-440 mbar hasta 570 mbar